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Three workers at a Taunton manufacturing plant suffered burns on their faces in hands in a chemical explosion early this morning, authorities said.

Taunton Fire Chief Timothy J. Bradshaw said the explosion occurred inside the IQE plant on John Hancock Road at approximately 12:25 a.m. Upon arrival, firefighters found three employees injured from flash burns.

Bradshaw said investigators determined the incident involved compressed hydrogen and arsine and that at the time of the explosion there was equipment under going maintenance.

No hazardous materials were released into the environment, he said.

The cause of the explosion remains under investigation.

The three employees were treated at Morton Hospital and released, Bradshaw said.

IQE manufacturers semiconductor wafers.