HoLiSTEP Demonstrates 500 nm Holographic Lithography and High-Topography Patterning
The HoLiSTEP project has reached two important milestones in holographic lithography: 500 nm patterning and patterning on high-topography wafers in photoresist SWITZERLAND, June 24, 2026 /EINPresswire.com/ -- The breakthrough results were …